The Design Non-contact Roughness Measurement System
Abstract:
This thesis is to design a design by optical interference principle of surface roughness measurement instrument. This instrument is mainly pided into four large pieces, respectively, X direction, Y direction, Z direction, and workbench. X and Y direction servo motors, couplings, ball screw, nut seat, bearings, housings are connected to form a mechanical transmission structure. Also in the nut seat position sensor is installed, the data is transmitted to the PC to control the servo motor driver, a closed loop system to adjust the displacement accuracy. In the telescopic table to fine-tune the angle of the table by three linear piezoelectric motor. Section in the Z direction, design a multi-block transition plate linear guides, a piezoelectric motor, CCD, a total optical interferometer lens together. The optical part is formed by using the optical interference fringe principle, coupled with different retardation value of the optical path is formed by calculating the roughness values thus obtained. Keywords: light interference; roughness; non-contact ; 源￥自%六^^维*论-文+网=www.lwfree.cn
目录

1.1 目的要求    2
1.1.1课题的任务内容    2
1.1.2原始条件及数据    2
1.2课题的重点    2
1.3课程的难点    2

2.1 光学测量    3
2.1.1 基于光学散射原理的测量技术    3
2.1.2 基于光学干涉原理的测量技术    3
2.1.3 光切法    3
2.1.4 散斑法    3
2.1.5 像散测定法    4
2.1.6  AFM    4
2.1.7 散射光角分布法    4
2.1.8  X射线漫散射法    5
2.2 方案介绍    6

3.1 驱动装置的选择    7
3.2 滚珠丝杠    7
3.2.1 滚珠丝杠的选择    8
3.2.2 滚珠丝杠支撑方式的选择    9
3.2.3 滚珠丝杠计算    11
3.3驱动装置的选择    11
3.4 联轴器的选择    11
3.5轴承的选择    11
3.6 直线导轨    12
3.6.1 直线导轨选择    12
3.6.2导轨计算    12

4.1 驱动装置的选择    13
4.2 滚珠丝杠    14
4.2.1 滚珠丝杠的选择    14
4.2.2 滚珠丝杠支撑方式的选择    14
4.2.3 滚珠丝杠计算    14
4.3驱动装置的选择    14
4.4 联轴器的选择    14
4.5轴承的选择    14 源￥自%六^^维*论-文+网=www.lwfree.cn