光学平晶平面度的点线面指标分析

Title   Analysing point、line、plane index of optical flat planeness
Abstract
According to JJG 28-2000,we discuss about the principle、equipments and the process of equal thickness interference method and the equal inclination interference method.Analysis the differences between the absolute Three-flat testing of equal thickness interference and equal inclination interference.On this base,we discuss about the simple method of using five testing points instead the cross section planeness and using two vertical cross sections' planeness instesd optical flat planeness according to the national standard,and do Three-flat testing to optical flat with the zygo interferometer to get the data and have an analysis.Then make a process to get the five points planeness index from the data the same like the simple method.In the end, we find that theThree-flat testing under equal thickness interference is more adaptable to optical flat planeness testing.And in the testing of optical flat planeness,single point and line index can't represent the planeness of the whole plane. 源自六[维^论'文]网.加7位QQ3249'114 www.lwfree.cn
Keywords  optical flat planeness    Three-flat testing

1  引言    4
1.1 本课题研究背景    4
1.2 光学平晶绝对检验发展现状    5
2  平晶及平晶的检定规程    7
2.1 计量性能要求    8
2.2 等厚干涉    10
2.3 等倾干涉    12
2.4利用平面等倾干涉仪测量平晶平面度    13
3 三面互检法    16
3.1 传统三面互检法    17
3.2 Zernike多项式拟合法    19
3.3 利用ZYGO干涉仪进行传统三面互检    22
4平面度的点线面指标分析    25
4.1 计算程序框图    25
4.2 总平面度计算    27

1  引言
1.1  本课题研究背景
平面是构成实体零件的重要几何要素之一, 如机床的平面导轨、工作台等, 而且常作为检测的基准面, 因此, 平面度误差的大小对产品的质量、使用寿面有着至关重要的影响。光干涉方法始终是检验高精度光学平面的有效手段,通常检验一块高质量的平面需要更高质量的平面作为参考基准,测试精度受参考平面精度的制约。因此，光学平晶平面度的精确测量显得尤为重要。
1.2  光学平晶绝对检验发展现状 光学平晶平面度的点线面指标分析:http://www.lwfree.cn/tongxin/20171011/14596.html
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