## 椭偏仪薄膜厚度的测量方法研究

结果显示，当测量角度在60到70度附近时，实验结果与参考值非常接近。但当薄膜表面不是十分清洁或者一些系统固有误差的影响，使得实验与参考值产生了一定误差。
本文的研究将针对实验原理进行细致的阐述，并且对实验误差进行可能的分析。也通过资料阅读了解其他可能的测量薄膜厚度的方法。

Title   Measurement of the thickness of a transparent film and error analysis
Abstract
The ultimate purpose of this paper is to research in the scientific method to measure the thickness of a transparent film with ellipsometry. At the same time, we make deep analysis on the deviation from the true value. We also consult large amount of paper and literature to further our understanding in our research and learn other efficient methods to measure the thickness of a transparent film.

The optical instrument-----Ellipsometry-----is often used to measure the thickness and refractive index and also other optical parameters of a transparent film. Compared with other experimental equipments which can also measure the thickness of transparent film, the supreme advantage is that for ellipsometry, there is not a rigid requirement of environment. For example, we don’t need to keep the experiment in vacuum. What’s more, ellipsometry can successfully realize measurement with high accuracy. The article is going to make clear measurement with different polarizing angles , especially those in maximum or minimum. Compared with the true value, we are going to find the deviation and the source of deviation.
According to our research, the experimental result is very close to the true one when the polarizing angles are around 60 degree. Whereas, when the transparent film itself is not so clear or because of systematic deviation, there is a tangible deviation between the experimental result and the true one.
This article is going to make meticulous analysis on the axiom of experiment and give deep consideration on the possible deviation. We also consult materials to know other useful ways to measure the thickness of a transparent film.
Keyword  transparent film, ellipsometry thickness, refractive index, error analysis

1  引言    1
1．1  薄膜测量的背景和意义    1
1．2  薄膜测量的国内外研究现状    2
1．3  椭偏仪的发展历史    3
1．4  本文的主要研究工作    3
2  理论基础    4
2．1  光的偏振    4
2．2  椭偏仪的工作原理    4
2．3  椭偏仪的使用    8

2．3．1  椭偏仪的主要测量指标    8
2．3．2  椭偏仪的组成与结构    8
3  实验    10
3．1  实验思想    10 椭偏仪薄膜厚度的测量方法研究:http://www.lwfree.cn/wuli/20180110/18951.html
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