## MATLAB严格耦合波方法研究不同金属光栅的光传输特性

Diffraction efficiencies of different metal gratings based on the rigorous coupled wave analysis
Abstract: RCWA is a vector theory to calculated Maxwell’s equations precisely with boundary conditions. This paper designed a one dimensional rectangular mental grating and used MATLAB modeling to analysis.We discussed in the same wave of the incident wave ,the influence on the diffraction efficiency of the grating with different mental mediums and the periods of the grating, grating filling coefficient, grating groove in the different angle of incidence. The study shows that different metal grating diffraction efficiency at the same incident angle is different, the maximum diffraction efficiencies corresponding to angles of incidence change with different periods of the grating, grating filling coefficient, grating groove and the peak of diffraction efficiency are mainly in 1.0°,30.0°,36.0°,70.0°or so.
Keywords: RCWA  Metal grating  Transmission characteristics

1. 绪论    1
1.1 衍射光学分析方法    1

1.2 本论文的研究内容    2
2． 相关理论和研究方法    3
2.1 光栅与衍射    3
2.1.1 一维矩形光栅    3
2.1.2 衍射效率    4
2.2 TE入射严格耦合波分析    5
2.3 金属的光学性质    10
2.3.1 计算介电常数的几种模型    10
2.3.2 Drude模型    10
2.3.3 常见金属的相对介电常数    11
3.数值模拟和结果分析    15
3.1 不同金属介质对衍射效率的影响    15
3.1.1 “0”级衍射    15
3.1.2 “1”级衍射    17
3.2 光栅结构参数对衍射效率的影响    18
3.2.1 光栅周期对衍射效率的影响    18
3.2.2 光栅槽深对衍射效率的影响    19
3.2.3 占空比对衍射效率的影响    20
4 总结和展望    22

1. 绪论
1.1 衍射光学分析方法
此处简单介绍几种衍射光学分析方法，分别是时域有限差分法、边界元法[ ][ ]、等效介质近似法、严格耦合波分析法。

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